ELEC 561 IC Fabrication Processes


3 semester hours

Overview of processes in manufacture of integrated circuits. Topics include: single crystal growth, oxide growth, photolithographic processes, ion implantation and impurity diffusion, metal deposition, and passivation and packaging of chips. Use is made of Unix workstations for modeling and simulation.

Prerequisite: ELEC 353  or equivalent.




Print-Friendly Page (opens a new window)