Loyola Marymount University Bulletin 2015-2016 [ARCHIVED CATALOG]
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ELEC 561 IC Fabrication Processes 3 semester hours
Overview of processes in manufacture of integrated circuits. Topics include: single crystal growth, oxide growth, photolithographic processes, ion implantation and impurity diffusion, metal deposition, and passivation and packaging of chips. Use is made of Unix workstations for modeling and simulation.
Prerequisite: ELEC 353 or equivalent.
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